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10-100 nm would be required, varying in absolute value over the surface of the wafer. An elegant method to correct wafer position is to include an adaptive element into the wafer stage, which allows
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of mechanical and physical properties of thin carbon/boron-nitride nanotube (CNT/BNNT) films. The goal of the project is to calibrate an existing numerical model and reproduce the realistic mechanical properties
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new methods to design, manufacture, and control novel and micro/nano-robotic systems that mimic motion of organisms. Techniques would be developed to track and control the path of the novel devices
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