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. - Development of an ICP-MS/MS measurement method (choice of reaction/collision gas, optimization of measurement parameters, correction of mass bias, etc.) to eliminate interferents and achieve the best possible
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-effectively integrated into advanced technology nodes for sensor, nonvolatile memory, logic, and neuromorphic applications. Currently, hafnium-zirconium mixed oxide (HfxZr1-xO2) offers the widest stoichiometry
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