-
10-100 nm would be required, varying in absolute value over the surface of the wafer. An elegant method to correct wafer position is to include an adaptive element into the wafer stage, which allows
-
PhD candidates. Our educational and research programmes are closely connected with UT research institutes Mesa+ Institute, TechMed Center and Digital Society Institute.
-
faculty is home to about 2,900 Bachelor's and Master's students, 550 employees and 150 PhD candidates. Our educational and research programmes are closely connected with UT research institutes Mesa
-
2,900 Bachelor's and Master's students, 550 employees and 150 PhD candidates. Our educational and research programmes are closely connected with UT research institutes Mesa+ Institute, TechMed Center and
-
new methods to design, manufacture, and control novel and micro/nano-robotic systems that mimic motion of organisms. Techniques would be developed to track and control the path of the novel devices