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10-100 nm would be required, varying in absolute value over the surface of the wafer. An elegant method to correct wafer position is to include an adaptive element into the wafer stage, which allows
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(deterministic) operations research methods to identify their respective advantages and application scenarios. 3. Integration and Methodological Evaluation: Develop a proof of concept to assess, integrate, and
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new methods to design, manufacture, and control novel and micro/nano-robotic systems that mimic motion of organisms. Techniques would be developed to track and control the path of the novel devices
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